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| R1L3S3P - Grid Array; 500, 100, 50, and 10 µm Grids, 3" x 1" |
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| Product Summary: |
Features
- 500 µm, 100 µm, 50 µm, and 10 µm Grid Arrays
- 4 Grid Arrays Centered on a 3” × 1” Microscope Slide
- Ideal for Stage Calibration and Distortion Detection
- Chrome-Plated on Glass Substrates
- Positive Resolution Test Target
Thorlabs’ R1L3S3P positive grid array features four chrome grids on a 3" x 1" glass slide. The four grid arrays are 500 µm, 100 µm, 50 µm, and 10 µm. Grid arrays are used to determine the distortion of an imaging system as the horizontal and vertical lines of the grid should be perpendicular to each other. A distorted image will show the lines as bowed; this image can then be used to correct for distortion. It is made in our semiconductor device production facility in Jessup, Maryland. We use contact photolithography with a mask aligner to define the pattern on the glass substrate. Once the pattern is defined, we then chemically etch the substrates and clean them in a class 100 cleanroom. The finished device is then checked with a critical dimension (CD) tool that is calibrated to NIST-traceable standards.
Specifications
- 4 Grid Arrays of 500 µm, 100 µm, 50 µm, and 10 µm.
- Flatness: <50 µm
- Design: Chrome-on-Glass
- Substrate: Soda Lime Glass
- Chrome Thickness: 0.120 µm
- Substrate Thickness: 0.06” (1.5 mm)
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