Features
- Ideal to Determine the Resolution of an Optical System
- 3” × 3” Target Offers up to 4.4 µm per Line Pair Resolution
- Conforms to MIL-S-150A Standard
- Chrome-Plated on Glass Substrates
- Positive Pattern Test Target
Thorlabs’ R3L3S1P is a positive 3" x 3" resolution test target made from plating chrome on a glass substrate. The 3" x 3" target has 10 groups (-2 to +7), with 6 elements per group to offer a maximum resolution of 228.0 line pairs per millimeter. The R3L3S1P is made at our semiconductor device production facility in Jessup, Maryland. We use contact photolithography with a mask aligner to define the pattern on the glass substrate. Once the pattern is defined, we then chemically etch the substrates and clean them in a class 100 cleanroom. The finished device is then checked with a critical dimension (CD) tool that is calibrated to NIST-traceable standards.
Specifications
- Max Resolution: 228.0 line pairs/mm
- Flatness: <50 µm
- Design: Chrome-on-Glass
- Substrate: Soda Lime Glass
- Chrome Thickness: 0.120 µm
- Substrate Thickness: 0.06” (1.5 mm)
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