Create an Account  |   Log In

View All »Matching Part Numbers


Your Shopping Cart is Empty
         

Dual-Axis Galvo Scan Head Systems, ±22.5° Scan Angle


  • 22.5° Scan Angle and Beam Diameters up to 45 mm
  • Protected Silver, Nd:YAG, or CO2 Laser Mirror Coatings
  • Easy to Integrate with OEM Systems
  • Analog Control Electronics

Two Servo Drivers
Included with
Each System

QS30XY-AG

Mirrors for Ø30 mm Beams,
Protected Silver Coating

Servo Driver Included with
Galvo Scanners for
Ø7 or Ø10 mm Beams

Servo Driver Included with
Galvo Scanners for
Ø15 to Ø45 mm Beams

Related Items


Please Wait
Dual-Axis Galvo Scan Head Selection Guide
Item # Prefix Mirror Coatingsa Max Beam
Diameter
Position
Detector
-AG -Y3 -Y1 -CD
QS7XY - 7 mm Optical
QS10XY - 10 mm
QS15XY - 15 mm
QS20XY 20 mm
QS30XY - - 30 mm Capacitive
QS45XY - - 45 mm
Power Supply & Command Cables
  • Item # Suffix, Coating, and Wavelength Range:
    • -AG: Protected Silver, 450 to 10.6 µm
    • -Y3: Nd:YAG Laser, 3rd Harmonic, 355 nm
    • -Y1: Nd:YAG Laser, 1064 nm
    • -CD: CO2 Laser, 10.64 µm

Applications

  • Laser Marking
  • Additive Manufacturing
  • Laser Engraving
  • Welding
  • Micromachining
  • Laser Drilling
  • Ablation/Surface Texturing
  • Cutting/Scribing
  • Laser Scanning Microscopy
  • Laser Projection
Galvo Webinar
Volume Pricing Discount

Large-Volume Orders

For orders where a large quantity of an item is purchased and the delivery of that item is scheduled with our production (i.e., not taken directly from inventory), Thorlabs passes on to the customer the cost savings associated with planned production of high volumes of that item. Since the volume and planned production are key to realizing the cost savings, we ask that you contact us to obtain volume pricing.

Additional requests can include custom optic sizes and coatings, specialized tuning, and variable cable options.

Contact Thorlabs

Features

  • Moving Magnet Motor Design for Fast Response (250 µs for 0.4° Optical with Mirrors for Ø7 mm Beams)
  • High-Precision Optical or Capacitive Mirror Position Detection (See Table to the Right for Details)
  • Four Mirror Coatings Available:
    • Protected Silver, 450 to 10.6 µm
    • Nd:YAG Laser, 3rd Harmonic, 355 nm
    • Nd:YAG Laser, 1064 nm
    • CO2 Laser, 10.64 µm
  • High Reflectance at 633 nm for Alignment Laser
  • Analog PID Control Electronics with Current Damping
  • 24" (610 mm) Drive Cable Included
  • Power Supply, Power Cables, and Command Cables Available Separately
  • Custom Coatings Available upon Request (Contact Tech Support for More Details)

These high-speed scanning galvanometer mirror positioning systems are designed for integration into OEM or custom laser beam steering applications. Models are available for beam diameters up to 45 mm. Each system includes a dual-axis galvo scan head with mirrors and matched driver cards. Dimensions and mounting features can be accessed by clicking on the red docs icon () next to the Item # below. A compatible power supply and command cable(s) are sold separately below. The user must provide a function generator or other analog voltage output device in order to operate the servo drivers. The mirrors are offered with one of four coatings, as shown in the table to the right. Custom coatings are available upon request. Please contact Tech Support for more details. We also offer single-axis systems with the galvo scanners used in these scan heads.

Servo Driver Board
These closed-loop servo drivers interpret the signals from the position detecting system inside the motor and produce the drive voltage required to rotate the mirror to the desired position. High bandwidth ensures following of analog command waveforms with speed and accuracy.

Both drivers feature proportional-integral-derivative (PID) servo driver circuits with advanced current damping for high performance. The drivers incorporate low-noise components to maximize the signal-to-noise ratio for better accuracy and low-drift components to reduce the effects of temperature variation. A notch filter is selected and tuned for each unique mirror-galvo combination to maximize system bandwidth for faster, more accurate scanning. These systems are ideal for use in applications including step-and-hold positioning, vector positioning (e.g., laser marking), and raster positioning (printing or laser scanning microscopy).

Servos are optimized for high-speed, precise positioning for all applications. Servos for scanners with ≥15 mm maximum beam diameters additionally feature dual-output power amplifiers to keep power supply requirements modest for larger motors without sacrificing performance. Servo driver circuits provide soft start/stop operation, open circuit AGC fail, and over/under-voltage protections. Onboard status LEDs indicate servo status and fault conditions and a diagnostic port provides position, velocity, error, and current information. Each driver-galvo-mirror set is tested and tuned to specification. The unique serial number of the galvo is noted on its associated driver board.

Galvo Scanner Specs
Item # Prefix QS7XY QS10XY QS15XY QS20XY QS30XY QS45XY
Max Beam Diameter 7 mm 10 mm 15 mm 20 mm 30 mm 45 mm
Mirror Substrate Fused Silica Silicon Carbide
Step Response Time (0.4° Optical) 250 µs 350 µs 600 µs 650 µs 1200 µs 1000 µs
Mechanical and Electrical Specs
Rated Excursion ±22.5° Opticala
Rotor
Inertial Load
Recommended 0.17 g·cm2 1.8 g·cm2 5.1 g·cm2
Max 0.85 g·cm2 9 g·cm2 25 g·cm2
Torque Constant 40 000 dyne·cm/A 180 000 dyne·cm/A 280 000 dyne·cm/A
Coil Resistance 1.3 Ω 3.0 Ω 5.8 Ω
Coil Inductance 76 µH @ 1 kHz 530 µH @ 1 kHz 450 µH @ 1 kHz
Position Detector
Type Optical Capacitive
Linearity 99.8% @ ±20° >99.9%
Gain Drift 50 ppm/°C 50 ppm/°C
Offset Drift 30 µrad/°C 40 µrad/°C
Repeatability 10 µrad 15 µrad
Output Signal
(Typ.)
Differential Mode 7.1 µA/° Optical 40 µA/° Optical
Common Mode 385 µA 2100 µA
Supply Current 30 - 40 mA 10 - 20 mA
General Specs
Operating Temperature 0 to 40 °C (Non-Condensing)
Storage Temperature -10 to 50 °C
Servo Shaft Size Ø14 mm x 26.3 mm Ø22 mm x 50 mm Ø30.5 mm x 30 mm
  • The optical angle is 2x the mechanical angle.
Mirror Coating Specs
Item # Suffix -AG -Y3 -Y1 -CD
Coating Type Protected Silver Hard Dielectric,
Nd:YAG Laser
3rd Harmonic
Hard Dielectric,
Nd:YAG Laser
Fundamental
Dielectric on Metal
for CO2 Laser
Absolute
Reflectance
≥92%
(450 - 500 nm)
≥94.5%
(500 - 2000 nm)
≥98%
(2 - 10.6 µm)
≥99% (355 nm)
≥80% (633 nm)
≥98% (1064 nm)
≥80% (633 nm)
≥99.5% (10.64 µm)
≥80% (633 nm)
Surface Quality
(Scratch-Dig)
40-20 20-10 40-20 40-20
Servo Amplifier Specsa
Item # Prefix QS7XY
QS10XY
QS15XY
QS20XY
QS30XY
QS45XY
Inputs
Command Input Range ±5 V
Position Input Scale Factor 0.22 V/° Optical
Command Input Impedance 400 kΩ (Differential)
200 kΩ (Single Ended)
20 kΩ ± 1% (Differential)
10 kΩ ± 1% (Single Ended)
Position Offset Range ±0.25 V
External Enable TTL (Low: Disable Drive) See Footnote b for Details
Diagnostic Outputs
Servo Ready TTL 12 V
Position 0.22 V/° Optical
Position Error 0.22 V/° Optical
Velocity Analog (Reference Only)
AGC Voltage Analog (DC)
Coil Current 1 V/A
Analog Output Impedance Unbuffered 1 kΩ ± 1% (For All Outputs)
Power Supply (Not Included)
Input Voltage ±15 VDC
<100 mV Ripple
<0.5% DC to 30 MHz Noise
±15 to ±24 VDC
<100 mV Ripple
<0.5% DC to 30 MHz Noise
Maximum Drive Current Limit 3 A (RMS); 10 A (Peak) 4 A (RMS); 10 A (Peak)
Quiescent Current 220 mA (Servo Enabled, Galvo at Rest)
Gain Drift Up to 20 ppm/°C
Offset Drift Up to 26 µrad/°C Up to 30 µrad/°C
General Specs
Operating Temperature 0 to 45 °C (With Appropriate Cooling)
Storage Temperature -10 to 60 °C
Dimensions 2.38" x 2.22" x 1.06"
(60.5 mm x 56.4 mm x 27.0 mm)
2.38" x 2.13" x 1.06"
(60.5 mm x 54.1 mm x 27.0 mm)
Mass (Weight) 49 g (1.7 oz) 74 g (2.6 oz)
  • Specifications are obtained after a 2 minute warm-up period.
  • The enable pin is soldered in the on position at the factory. To enable remote control, remove the solder or contact us prior to purchase to obtain an unsoldered unit.
Dual-Axis Galvo Scanning System

Galvo Motor/Mirror Assembly
The galvo consists of a galvanometer-based scanning motor with an optical mirror mounted on the shaft and a detector that provides positional feedback to the control board. The moving magnet design for the QS series of galvanometer motors was chosen over a stationary magnet and rotating coil design in order to provide the fastest response times and the highest system resonant frequency. The position of the mirror is encoded using an optical or capacitive sensing system located inside of the motor housing.

Due to the large angular acceleration of the rotation shaft, the size, shape, and inertia of the mirrors become significant factors in the design of high-performance galvo systems. Furthermore, the mirror must remain rigid (flat) even when subjected to large accelerations. All these factors have been precisely balanced in our galvo systems in order to match the characteristics of the galvo motor and maximize performance of the system.

The galvo mirrors are secured to the motor/mirror assembly by a flexure clamp. The positions of the mirror holders are set at the factory and should not be changed by the user.

System Operation
The servo driver must be connected to a DC power supply, the galvo motor, and an input voltage source (the monitoring connection is optional). For continuous scanning applications, a function generator with a square or sine wave output is sufficient for scanning the galvo mirror over its entire range. For more complex scanning patterns, a programmable voltage source such as a DAQ card can be used. User-generated motion trajectories with smooth acceleration profiles are preferred; uncontrolled steps should be avoided if possible. Please note that these systems do not include a power supply (sold separately below), function generator, or DAQ card. The drivers below are factory configured for a 0.22 V/° ratio between the input voltage and mirror position, as well as an input voltage of ±5 VDC. Drivers configured for 0.44 V/° and ±10 VDC are available upon request; please contact Tech Support. The control circuit also provides monitoring outputs that allow the user to track the position of the mirror. In addition, voltages proportional to the drive current being supplied to the motor and the difference between the command position and the actual position of the mirror are supplied by the control circuit.

Note that in dual-axis systems it is important to maintain a robust common ground between both drivers to minimize coupling (crosstalk) through a shared power supply. Heavy gauge ground jumpers are included with all dual-axis systems.

Closed-Loop Mirror Positioning
The angular orientation (position) of the mirror is measured using an optical or capacitive sensing system, which is integrated into the interior of the galvanometer housing, and allows for the closed-loop operation of the galvo mirror system.


Posted Comments:
Stephen Uhlhorn  (posted 2021-01-09 14:04:50.997)
Can you send me a quote for the servo driver board only? In looking at the analog driver used with the larger aperture scanners (Nutfield QD-4000).
YLohia  (posted 2021-01-11 03:06:32.0)
Hello, custom (or component) item quotes for these galvos can be requested by emailing tms-sales@thorlabs.com or by clicking the "Request Quote" button above. We will contact you directly.

Dual-Axis Galvo Scan Heads, 7 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS7XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
7 mm Optical ±22.5° Optical 0.17 g·cm2 250 µs
QS7XY-Y3 Nd:YAG Laser, 3rd Harmonic:
Rabs ≥ 99% (355 nm)
Rabs ≥ 80% (633 nm)
QS7XY-Y1 Nd:YAG Laser:
Rabs ≥ 98% (1064 nm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS2F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS7XY-AG Support Documentation
QS7XY-AGDual-Axis, Ø7 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$3,880.00
Lead Time
QS7XY-Y3 Support Documentation
QS7XY-Y3Dual-Axis, Ø7 mm Beam Galvo System, Mirrors Coated for 355 nm (Power Supply & Cables Sold Separately)
$4,080.00
Lead Time
QS7XY-Y1 Support Documentation
QS7XY-Y1Dual-Axis, Ø7 mm Beam Galvo System, Mirrors Coated for 1064 nm (Power Supply & Cables Sold Separately)
$3,880.00
Today

Dual-Axis Galvo Scan Heads, 10 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS10XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
10 mm Optical ±22.5° Optical 0.17 g·cm2 350 µs
QS10XY-Y3 Nd:YAG Laser, 3rd Harmonic:
Rabs ≥ 99% (355 nm)
Rabs ≥ 80% (633 nm)
QS10XY-Y1 Nd:YAG Laser:
Rabs ≥ 98% (1064 nm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS2F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS10XY-AG Support Documentation
QS10XY-AGDual-Axis, Ø10 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$4,029.00
Lead Time
QS10XY-Y3 Support Documentation
QS10XY-Y3Dual-Axis, Ø10 mm Beam Galvo System, Mirrors Coated for 355 nm (Power Supply & Cables Sold Separately)
$4,229.00
Lead Time
QS10XY-Y1 Support Documentation
QS10XY-Y1Dual-Axis, Ø10 mm Beam Galvo System, Mirrors Coated for 1064 nm (Power Supply & Cables Sold Separately)
$4,029.00
Lead Time

Dual-Axis Galvo Scan Heads, 15 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS15XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
15 mm Optical ±22.5° Optical 1.8 g·cm2 600 µs
QS15XY-Y3 Nd:YAG Laser, 3rd Harmonic:
Rabs ≥ 99% (355 nm)
Rabs ≥ 80% (633 nm)
QS15XY-Y1 Nd:YAG Laser:
Rabs ≥ 98% (1064 nm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS3F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS15XY-AG Support Documentation
QS15XY-AGDual-Axis, Ø15 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$3,072.00
Lead Time
QS15XY-Y3 Support Documentation
QS15XY-Y3Dual-Axis, Ø15 mm Beam Galvo System, Mirrors Coated for 355 nm (Power Supply & Cables Sold Separately)
$3,272.00
Lead Time
QS15XY-Y1 Support Documentation
QS15XY-Y1Dual-Axis, Ø15 mm Beam Galvo System, Mirrors Coated for 1064 nm (Power Supply & Cables Sold Separately)
$3,072.00
Today

Dual-Axis Galvo Scan Heads, 20 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS20XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
20 mm Optical ±22.5° Optical 1.8 g·cm2 650 µs
QS20XY-Y3 Nd:YAG Laser, 3rd Harmonic:
Rabs ≥ 99% (355 nm)
Rabs ≥ 80% (633 nm)
QS20XY-Y1 Nd:YAG Laser:
Rabs ≥ 98% (1064 nm)
Rabs ≥ 80% (633 nm)
QS20XY-CD CO2 Laser:
Rabs ≥ 99.5% (10.64 µm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS3F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS20XY-AG Support Documentation
QS20XY-AGDual-Axis, Ø20 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$4,037.00
Lead Time
QS20XY-Y3 Support Documentation
QS20XY-Y3Dual-Axis, Ø20 mm Beam Galvo System, Mirrors Coated for 355 nm (Power Supply & Cables Sold Separately)
$4,237.00
Lead Time
QS20XY-Y1 Support Documentation
QS20XY-Y1Dual-Axis, Ø20 mm Beam Galvo System, Mirrors Coated for 1064 nm (Power Supply & Cables Sold Separately)
$4,037.00
Lead Time
QS20XY-CD Support Documentation
QS20XY-CDDual-Axis, Ø20 mm Beam Galvo System, Mirrors Coated for 10.64 µm (Power Supply & Cables Sold Separately)
$4,237.00
Lead Time

Dual-Axis Galvo Scan Heads, 30 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS30XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
30 mm Capacitive ±22.5° Optical 5.1 g·cm2 1200 µs
QS30XY-CD CO2 Laser:
Rabs ≥ 99.5% (10.64 µm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS3F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS30XY-AG Support Documentation
QS30XY-AGDual-Axis, Ø30 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$4,768.00
Lead Time
QS30XY-CD Support Documentation
QS30XY-CDDual-Axis, Ø30 mm Beam Galvo System, Mirrors Coated for 10.64 µm (Power Supply & Cables Sold Separately)
$5,068.00
Lead Time

Dual-Axis Galvo Scan Heads, 45 mm Max Beam Diameter

Key Specsa
Item # Mirror Coating Max Beam Diameter Position Detector Rated Excursion Recommended Rotor Inertial Load Step Response Time
QS45XY-AG Protected Silver:
Rabs ≥ 92% (450 - 500 nm)
Rabs ≥ 94.5% (500 - 2000 nm)
Rabs ≥ 98% (2 - 10.6 µm)
45 mm,
Converging
Capacitive ±22.5° Optical 5.1 g·cm2 1000 µs
QS45XY-CD CO2 Laser:
Rabs ≥ 99.5% (10.64 µm)
Rabs ≥ 80% (633 nm)
  • For complete specifications, please refer to the Specs tab.

Each system includes a galvo scan head, driver boards, and drive cables. A compatible GPWR15 Power Supply and CBLS3F Command and Power Cables (two required for dual-axis systems) can be purchased separately below.

Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
QS45XY-AG Support Documentation
QS45XY-AGDual-Axis, Ø45 mm Beam Galvo System, Protected Silver Mirrors (Power Supply & Cables Sold Separately)
$19,049.00
Lead Time
QS45XY-CD Support Documentation
QS45XY-CDDual-Axis, Ø45 mm Beam Galvo System, Mirrors Coated for 10.64 µm (Power Supply & Cables Sold Separately)
$19,349.00
Lead Time

Power Supply & Command Cables

  • GPWR15: ±15 V Power Supply for QS Series Galvo Scanners (Single- and Dual-Axis Systems; One Supply Can Power up to Two Galvos)
    • Input: 100-120 or 220-240 VAC
    • Output: ±15 V @ 5 A (150 W Max Power)
    • Operating Temperature: 0 to 50 °C
    • Dimensions: 14.0" x 4.9" x 3.5" (356 mm x 124 mm x 90 mm)
  • CBLS2F: Command and Power Cables for QS7 and QS10 Series Galvo Scanners (One Set Required per Axis)
  • CBLS3F: Command and Power Cables for QS15/20/30/45 Series Galvo Scanners (One Set Required per Axis)
Based on your currency / country selection, your order will ship from Newton, New Jersey  
+1 Qty Docs Part Number - Universal Price Available
GPWR15 Support Documentation
GPWR15±15 V Power Supply for BLINK & QS, SS, SP, & XG Series Galvo Scanners
$427.00
Lead Time
CBLS2F Support Documentation
CBLS2FNEW!Command and Power Cables for BLINK & QS7/10 Series Galvo Scanners (Single Axis)
$52.00
Today
CBLS3F Support Documentation
CBLS3FCommand and Power Cables for QS15/20/30/45, SS, & SP Series Galvo Scanners (Single Axis)
$90.00
Lead Time
Log In  |   My Account  |   Contact Us  |   Careers  |   Privacy Policy  |   Home  |   FAQ  |   Site Index
Regional Websites:East Coast US | West Coast US | Asia | China | Japan
Copyright © 1999-2021 Thorlabs, Inc.
Sales: 1-973-300-3000
Technical Support: 1-973-300-3000


High Quality Thorlabs Logo 1000px:Save this Image