Piezoelectric Deformable Mirrors

Introduction:
Adaptive optics (AO) is a rapidly growing multidisciplinary field encompassing physics, chemistry, electronics, and computer science. AO systems are used to correct (shape) the wavefront of a beam of light. Historically, these systems have their roots in the international astronomy and US defense communities. Astronomers realized that if they could compensate for the aberrations caused by atmospheric turbulence, they would be able to generate high resolution astronomical images; with sharper images comes an additional gain in contrast, which is also advantageous for astronomers since it means that they can detect fainter objects that would otherwise go unnoticed. While astronomers were trying to overcome the blurring effects of atmospheric turbulence, defense contractors were interested in ensuring that photons from their high-power lasers would be correctly pointed so as to destroy strategic targets. More recently, due to advancements in the sophistication and simplicity of AO components, researchers have utilized these systems to make breakthroughs in the areas of femtosecond pulse shaping, microscopy, laser communication, vision correction, and retinal imaging. Although dramatically different fields, all of these areas benefit from an AO system due to undesirable time-varying effects.

Typically, an AO system is comprised from three components: (1) a wavefront sensor, which measures these wavefront deviations, (2) a deformable mirror, which can change shape in order to modify a highly distorted optical wavefront, and (3) real-time control software, which uses the information collected by the wavefront sensor to calculate the appropriate shape that the deformable mirror should assume in order to compensate for the distorted wavefront. Together, these three components operate in a closed-loop fashion. By this, we mean that any changes caused by the AO system can also be detected by that system. In principle, this closed-loop system is fundamentally simple; it measures the phase as a function of the position of the optical wavefront under consideration, determines its aberration, computes a correction, reshapes the deformable mirror, observes the consequence of that correction, and then repeats this process over and over again as necessary if the phase aberration varies with time. Via this procedure, the AO system is able to improve optical resolution of an image by removing aberrations from the wavefront of the light being imaged.

The Wavefront Sensor:
The role of the wavefront sensor in an adaptive optics system is to measure the wavefront deviations from a reference wavefront. There are three basic configurations of wavefront sensors available: Shack-Hartmann wavefront sensors, shearing interferometers, and curvature sensors. Each has its own advantages in terms of noise, accuracy, sensitivity, and ease of interfacing it with the control software and deformable mirror. Of these, the Shack-Hartmann wavefront sensor has been the most widely used.

A Shack-Hartmann wavefront sensor uses a lenslet array to divide an incoming beam into a bunch of smaller beams, each of which is imaged onto a CCD camera, which is placed at the focal plane of the lenslet array. If a uniform plane wave is incident on a Shack-Hartmann wavefront sensor (refer to Fig. 1), a focused spot is formed along the optical axis of each lenslet, yielding a regularly spaced grid of spots in the focal plane. However, if a distorted wavefront (i.e., any non-flat wavefront) is used, the focal spots will be displaced from the optical axis of each lenslet. The amount of shift of each spot’s centroid is proportional to the local slope (i.e., tilt) of the wavefront at the location of that lenslet. The wavefront phase can then be reconstructed (within a constant) from the spot displacement information obtained (see Fig. 2).

Figure 3. Dynamic range and measurement sensitivity are competing properties of a Shack-Hartmann wavefront sensor. Here, f, Δy, and d represent the focal length of the lenslet, the spot displacement, and the lenslet diameter, respectively. The equations provided for the measurement sensitivity θ _min and the dynamic range θ_max are obtained using the small angle approximation. θ_min is the minimum wavefront slope that can be measured by the wavefront sensor. The minimum detectable spot displacement Δy_min depends on the pixel size of the photodetector, the accuracy of the centroid algorithm, and the signal to noise ratio of the sensor. θ_max is the maximum wavefront slope that can be measured by the wavefront sensor and corresponds to a spot displacement of Δy_max, which is equal to half of the lenslet diameter. Therefore, increasing the sensitivity will decrease the dynamic range and vice versa.

The four parameters that greatly affect the performance of a given Shack-Hartmann wavefront sensor are the number of lenslets (or lenslet diameter, which typically ranges from ~100 – 600 μm), dynamic range, measurement sensitivity, and the focal length of the lenslet array (typical values range from a few millimeters to about 30 mm). The number of lenslets restricts the maximum number of Zernike coefficients that a reconstruction algorithm can reliably calculate; studies have found that the maximum number of coefficients that can be used to represent the original wavefront is approximately the same as the number of lenslets. When selecting the number of lenslets needed, one must take into account the amount of distortion s/he is trying to model (i.e., how many Zernike coefficients are needed to effectively represent the true wave aberration). When it comes to measurement sensitivity θ_min and dynamic range θ_max, these are competing specifications (see Fig. 3 to the right). The former determines the minimum phase that can be detected while the latter determines the maximum phase that can be measured.

A Shack-Hartmann sensor’s measurement accuracy (i.e., the minimum wavefront slope that can be measured reliably) depends on its ability to precisely measure the displacement of a focused spot with respect to a reference position, which is located along the optical axis of the lenslet. A conventional algorithm will fail to determine the correct centroid of a spot if it partially overlaps another spot or if the focal spot of a lenslet falls outside of the area of the sensor assigned to detect it (i.e., spot crossover). Special algorithms can be implemented to overcome these problems, but they limit the dynamic range of the sensor (i.e., the maximum wavefront slope that can be measured reliably). The dynamic range of a system can be increased by using a lenslet with either a larger diameter or a shorter focal length. However, the lenslet diameter is tied to the needed number of Zernike coefficients; therefore, the only other way to increase the dynamic range is to shorten the focal length of the lenslet, but this in turn, decreases the measurement sensitivity. Ideally, choose the longest focal length lens that meets both the dynamic range and measurement sensitivity requirements.

The Shack-Hartmann wavefront sensor is capable of providing information about the intensity profile as well as the calculated wavefront. Be careful not to confuse these. The left-hand frame of Fig. 4 shows a sample intensity profile, whereas the right-hand frame shows the corresponding wavefront profile. It is possible to obtain the same intensity profile from various wavefunction distributions.

The Deformable Mirror:
The deformable mirror (DM) changes shape in response to position commands in order to compensate for the aberrations measured by the Shack-Hartmann wavefront sensor (refer to the Aberrations tab to learn more about the aberrations that the DM can correct). Ideally, it will assume a surface shape that is conjugate to the aberration profile (see Fig. 5). In many cases, the surface profile is controlled by an underlying array of actuators that move in and out in response to an applied voltage. Deformable mirrors come in several different varieties, but the two most popular categories are segmented and continuous (see Fig. 6). Segmented mirrors are comprised from individual flat segments that can either move up and down (if each segment is controlled by just one actuator) or have tip, tilt, and piston motion (if each segment is controlled by three actuators). These mirrors are typically used in holography and for spatial light modulators. Advantages of this configuration include the ability to manufacture the segments to tight tolerances, the elimination of coupling between adjacent segments of the DM since each acts independently, and the number of degrees of freedom per segment. However, on the down side, the regularly spaced gaps between the segments act like a diffraction pattern, thereby introducing diffractive modes into the beam. In addition, segmented mirrors require more actuators than continuous mirrors to compensate for a given incoming distorted wavefront. To address the optical problems with segmented DMs, continuous faceplate DMs (such as those included in our AO Kits) were fabricated. They offer a higher fill factor (i.e., the percentage of the mirror that is actually reflective) than their segmented counterparts. However, their drawback is that the actuators are mechanically coupled. Therefore, when one actuator moves, there is some finite response along the entire surface of the mirror. The 2D shape of the surface caused by displacing one actuator is called the influence function for that actuator. Typically, adjacent actuators of a continuous DM are displaced by 10-20% of the actuation height; this percentage is known as the actuator coupling. Note that segmented DMs exhibit zero coupling but that isn’t necessarily desirable.

The range of wavefronts that can be corrected by a particular DM is limited by the actuator stroke and resolution, the number and distribution of actuators, and the model used to determine the appropriate control signals for the DM; the first two are physical limitations of the DM itself, whereas the last one is a limitation of the control software. The actuator stroke is another term for the dynamic range (i.e., the maximum displacement) of the DM actuators and is typically measured in microns. Inadequate actuator stroke leads to poor performance and can prevent the convergence of the control loop. The number of actuators determines the number of degrees of freedom that the mirror can correct for. Although many different actuator arrays have been proposed, including square, triangular, and hexagonal, most DMs are built with square actuator arrays, which are easy to position on a Cartesian coordinate system and map easily to the square detector arrays on the wavefront sensors. To fit the square array on a circular aperture, the corner actuators are sometimes removed (e.g., the deformable mirror included with the AOK1-UM01 or AOK1-UP01 has a 12 x 12 actuator configuration but only 140 actuators since the corner ones are not used). Although more actuators can be placed within a given area using some of the other configurations, the additional fabrication complexity usually does not warrant that choice.

Figure 7 (left frame) shows a screen shot of a cross formed on the 12 x 12 actuator array of the DM included with the adaptive optics kit. To create this screen shot, the voltages applied to the middle two rows and middle two columns of actuators were set to cause full deflection of the mirror membrane. In addition to the software screen shot depicting the DM surface, quasi-dark field illumination was used to obtain a photograph of the actual DM surface when programmed to these settings (see Fig. 7, right frame)

The Control Software:
In an adaptive optics setup, the control software is the vital link between the wavefront sensor and the deformable mirror. It converts the wavefront sensor’s electrical signals, which are proportional to the slope of the wavefront, into compensating voltage commands that are sent to each actuator of the DM. The closed-loop bandwidth of the adaptive optics system is directly related to the speed and accuracy with which this computation is done, but in general, these calculations must occur on a shorter time scale than the aberration fluctuations.

In essence, the control software uses the spot field deviations to reconstructs the phase of the beam (in this case, using Zernike polynomials) and then sends conjugate commands to the DM. A least-squares fitting routine is applied to the calculated wavefront phase in order to determine the effective Zernike polynomial data outputted for the end user. Although not the only form possible, Zernike polynomials provide a unique and convenient way to describe the phase of a beam. These polynomials form an orthogonal basis set over a unit circle with different terms representing the amount of focus, tilt, astigmatism, comma, et cetera; the polynomials are normalized so that the maximum of each term (except the piston term) is +1, the minimum is –1, and the average over the surface is always zero. Furthermore, no two aberrations ever add up to a third, thereby leaving no doubt about the type of aberration that is present.

Laser Induced Damage Threshold Tutorial

The following is a general overview of how laser induced damage thresholds are measured and how the values may be utilized in determining the appropriateness of an optic for a given application. When choosing optics, it is important to understand the Laser Induced Damage Threshold (LIDT) of the optics being used. The LIDT for an optic greatly depends on the type of laser you are using. Continuous wave (CW) lasers typically cause damage from thermal effects (absorption either in the coating or in the substrate). Pulsed lasers, on the other hand, often strip electrons from the lattice structure of an optic before causing thermal damage. Note that the guideline presented here assumes room temperature operation and optics in new condition (i.e., within scratch-dig spec, surface free of contamination, etc.). Because dust or other particles on the surface of an optic can cause damage at lower thresholds, we recommend keeping surfaces clean and free of debris. For more information on cleaning optics, please see our Optics Cleaning tutorial.

Testing Method

Thorlabs' LIDT testing is done in compliance with ISO/DIS 11254 and ISO 21254 specifications.

First, a low-power/energy beam is directed to the optic under test. The optic is exposed in 10 locations to this laser beam for 30 seconds (CW) or for a number of pulses (pulse repetition frequency specified). After exposure, the optic is examined by a microscope (~100X magnification) for any visible damage. The number of locations that are damaged at a particular power/energy level is recorded. Next, the power/energy is either increased or decreased and the optic is exposed at 10 new locations. This process is repeated until damage is observed. The damage threshold is then assigned to be the highest power/energy that the optic can withstand without causing damage. A histogram such as that below represents the testing of one BB1-E02 mirror.

The photograph above is a protected aluminum-coated mirror after LIDT testing. In this particular test, it handled 0.43 J/cm² (1064 nm, 10 ns pulse, 10 Hz, Ø1.000 mm) before damage.

According to the test, the damage threshold of the mirror was 2.00 J/cm² (532 nm, 10 ns pulse, 10 Hz, Ø0.803 mm). Please keep in mind that these tests are performed on clean optics, as dirt and contamination can significantly lower the damage threshold of a component. While the test results are only representative of one coating run, Thorlabs specifies damage threshold values that account for coating variances.

Continuous Wave and Long-Pulse Lasers

When an optic is damaged by a continuous wave (CW) laser, it is usually due to the melting of the surface as a result of absorbing the laser's energy or damage to the optical coating (antireflection) [1]. Pulsed lasers with pulse lengths longer than 1 µs can be treated as CW lasers for LIDT discussions.

When pulse lengths are between 1 ns and 1 µs, laser-induced damage can occur either because of absorption or a dielectric breakdown (therefore, a user must check both CW and pulsed LIDT). Absorption is either due to an intrinsic property of the optic or due to surface irregularities; thus LIDT values are only valid for optics meeting or exceeding the surface quality specifications given by a manufacturer. While many optics can handle high power CW lasers, cemented (e.g., achromatic doublets) or highly absorptive (e.g., ND filters) optics tend to have lower CW damage thresholds. These lower thresholds are due to absorption or scattering in the cement or metal coating.

Pulsed lasers with high pulse repetition frequencies (PRF) may behave similarly to CW beams. Unfortunately, this is highly dependent on factors such as absorption and thermal diffusivity, so there is no reliable method for determining when a high PRF laser will damage an optic due to thermal effects. For beams with a high PRF both the average and peak powers must be compared to the equivalent CW power. Additionally, for highly transparent materials, there is little to no drop in the LIDT with increasing PRF.

In order to use the specified CW damage threshold of an optic, it is necessary to know the following:

1. Wavelength of your laser
2. Beam diameter of your beam (1/e²)
3. Approximate intensity profile of your beam (e.g., Gaussian)
4. Linear power density of your beam (total power divided by 1/e² beam diameter)

Thorlabs expresses LIDT for CW lasers as a linear power density measured in W/cm. In this regime, the LIDT given as a linear power density can be applied to any beam diameter; one does not need to compute an adjusted LIDT to adjust for changes in spot size, as demonstrated by the graph to the right. Average linear power density can be calculated using the equation below. 

The calculation above assumes a uniform beam intensity profile. You must now consider hotspots in the beam or other non-uniform intensity profiles and roughly calculate a maximum power density. For reference, a Gaussian beam typically has a maximum power density that is twice that of the uniform beam (see lower right).

Now compare the maximum power density to that which is specified as the LIDT for the optic. If the optic was tested at a wavelength other than your operating wavelength, the damage threshold must be scaled appropriately. A good rule of thumb is that the damage threshold has a linear relationship with wavelength such that as you move to shorter wavelengths, the damage threshold decreases (i.e., a LIDT of 10 W/cm at 1310 nm scales to 5 W/cm at 655 nm):

While this rule of thumb provides a general trend, it is not a quantitative analysis of LIDT vs wavelength. In CW applications, for instance, damage scales more strongly with absorption in the coating and substrate, which does not necessarily scale well with wavelength. While the above procedure provides a good rule of thumb for LIDT values, please contact Tech Support if your wavelength is different from the specified LIDT wavelength. If your power density is less than the adjusted LIDT of the optic, then the optic should work for your application. 

Please note that we have a buffer built in between the specified damage thresholds online and the tests which we have done, which accommodates variation between batches. Upon request, we can provide individual test information and a testing certificate. The damage analysis will be carried out on a similar optic (customer's optic will not be damaged). Testing may result in additional costs or lead times. Contact Tech Support for more information.

Pulsed Lasers

As previously stated, pulsed lasers typically induce a different type of damage to the optic than CW lasers. Pulsed lasers often do not heat the optic enough to damage it; instead, pulsed lasers produce strong electric fields capable of inducing dielectric breakdown in the material. Unfortunately, it can be very difficult to compare the LIDT specification of an optic to your laser. There are multiple regimes in which a pulsed laser can damage an optic and this is based on the laser's pulse length. The highlighted columns in the table below outline the relevant pulse lengths for our specified LIDT values.

Pulses shorter than 10^-9 s cannot be compared to our specified LIDT values with much reliability. In this ultra-short-pulse regime various mechanics, such as multiphoton-avalanche ionization, take over as the predominate damage mechanism [2]. In contrast, pulses between 10^-7 s and 10^-4 s may cause damage to an optic either because of dielectric breakdown or thermal effects. This means that both CW and pulsed damage thresholds must be compared to the laser beam to determine whether the optic is suitable for your application.

When comparing an LIDT specified for a pulsed laser to your laser, it is essential to know the following:

1. Wavelength of your laser
2. Energy density of your beam (total energy divided by 1/e² area)
3. Pulse length of your laser
4. Pulse repetition frequency (prf) of your laser
5. Beam diameter of your laser (1/e² )
6. Approximate intensity profile of your beam (e.g., Gaussian)

The energy density of your beam should be calculated in terms of J/cm². The graph to the right shows why expressing the LIDT as an energy density provides the best metric for short pulse sources. In this regime, the LIDT given as an energy density can be applied to any beam diameter; one does not need to compute an adjusted LIDT to adjust for changes in spot size. This calculation assumes a uniform beam intensity profile. You must now adjust this energy density to account for hotspots or other nonuniform intensity profiles and roughly calculate a maximum energy density. For reference a Gaussian beam typically has a maximum energy density that is twice that of the 1/e² beam.

Now compare the maximum energy density to that which is specified as the LIDT for the optic. If the optic was tested at a wavelength other than your operating wavelength, the damage threshold must be scaled appropriately [3]. A good rule of thumb is that the damage threshold has an inverse square root relationship with wavelength such that as you move to shorter wavelengths, the damage threshold decreases (i.e., a LIDT of 1 J/cm² at 1064 nm scales to 0.7 J/cm² at 532 nm):

You now have a wavelength-adjusted energy density, which you will use in the following step.

Beam diameter is also important to know when comparing damage thresholds. While the LIDT, when expressed in units of J/cm², scales independently of spot size; large beam sizes are more likely to illuminate a larger number of defects which can lead to greater variances in the LIDT [4]. For data presented here, a <1 mm beam size was used to measure the LIDT. For beams sizes greater than 5 mm, the LIDT (J/cm2) will not scale independently of beam diameter due to the larger size beam exposing more defects.

The pulse length must now be compensated for. The longer the pulse duration, the more energy the optic can handle. For pulse widths between 1 - 100 ns, an approximation is as follows:

Use this formula to calculate the Adjusted LIDT for an optic based on your pulse length. If your maximum energy density is less than this adjusted LIDT maximum energy density, then the optic should be suitable for your application. Keep in mind that this calculation is only used for pulses between 10^-9 s and 10^-7 s. For pulses between 10^-7 s and 10^-4 s, the CW LIDT must also be checked before deeming the optic appropriate for your application.

Please note that we have a buffer built in between the specified damage thresholds online and the tests which we have done, which accommodates variation between batches. Upon request, we can provide individual test information and a testing certificate. Contact Tech Support for more information.

[1] R. M. Wood, Optics and Laser Tech. 29, 517 (1998).
[2] Roger M. Wood, Laser-Induced Damage of Optical Materials (Institute of Physics Publishing, Philadelphia, PA, 2003).
[3] C. W. Carr et al., Phys. Rev. Lett. 91, 127402 (2003).
[4] N. Bloembergen, Appl. Opt. 12, 661 (1973).

In order to illustrate the process of determining whether a given laser system will damage an optic, a number of example calculations of laser induced damage threshold are given below. For assistance with performing similar calculations, we provide a spreadsheet calculator that can be downloaded by clicking the button to the right. To use the calculator, enter the specified LIDT value of the optic under consideration and the relevant parameters of your laser system in the green boxes. The spreadsheet will then calculate a linear power density for CW and pulsed systems, as well as an energy density value for pulsed systems. These values are used to calculate adjusted, scaled LIDT values for the optics based on accepted scaling laws. This calculator assumes a Gaussian beam profile, so a correction factor must be introduced for other beam shapes (uniform, etc.). The LIDT scaling laws are determined from empirical relationships; their accuracy is not guaranteed. Remember that absorption by optics or coatings can significantly reduce LIDT in some spectral regions. These LIDT values are not valid for ultrashort pulses less than one nanosecond in duration.

A Gaussian beam profile has about twice the maximum intensity of a uniform beam profile.

CW Laser Example
Suppose that a CW laser system at 1319 nm produces a 0.5 W Gaussian beam that has a 1/e² diameter of 10 mm. A naive calculation of the average linear power density of this beam would yield a value of 0.5 W/cm, given by the total power divided by the beam diameter:

However, the maximum power density of a Gaussian beam is about twice the maximum power density of a uniform beam, as shown in the graph to the right. Therefore, a more accurate determination of the maximum linear power density of the system is 1 W/cm.

An AC127-030-C achromatic doublet lens has a specified CW LIDT of 350 W/cm, as tested at 1550 nm. CW damage threshold values typically scale directly with the wavelength of the laser source, so this yields an adjusted LIDT value:

The adjusted LIDT value of 350 W/cm x (1319 nm / 1550 nm) = 298 W/cm is significantly higher than the calculated maximum linear power density of the laser system, so it would be safe to use this doublet lens for this application.

Pulsed Nanosecond Laser Example: Scaling for Different Pulse Durations
Suppose that a pulsed Nd:YAG laser system is frequency tripled to produce a 10 Hz output, consisting of 2 ns output pulses at 355 nm, each with 1 J of energy, in a Gaussian beam with a 1.9 cm beam diameter (1/e²). The average energy density of each pulse is found by dividing the pulse energy by the beam area:

As described above, the maximum energy density of a Gaussian beam is about twice the average energy density. So, the maximum energy density of this beam is ~0.7 J/cm².

The energy density of the beam can be compared to the LIDT values of 1 J/cm² and 3.5 J/cm² for a BB1-E01 broadband dielectric mirror and an NB1-K08 Nd:YAG laser line mirror, respectively. Both of these LIDT values, while measured at 355 nm, were determined with a 10 ns pulsed laser at 10 Hz. Therefore, an adjustment must be applied for the shorter pulse duration of the system under consideration. As described on the previous tab, LIDT values in the nanosecond pulse regime scale with the square root of the laser pulse duration:

This adjustment factor results in LIDT values of 0.45 J/cm² for the BB1-E01 broadband mirror and 1.6 J/cm² for the Nd:YAG laser line mirror, which are to be compared with the 0.7 J/cm² maximum energy density of the beam. While the broadband mirror would likely be damaged by the laser, the more specialized laser line mirror is appropriate for use with this system.

Pulsed Nanosecond Laser Example: Scaling for Different Wavelengths
Suppose that a pulsed laser system emits 10 ns pulses at 2.5 Hz, each with 100 mJ of energy at 1064 nm in a 16 mm diameter beam (1/e²) that must be attenuated with a neutral density filter. For a Gaussian output, these specifications result in a maximum energy density of 0.1 J/cm². The damage threshold of an NDUV10A Ø25 mm, OD 1.0, reflective neutral density filter is 0.05 J/cm² for 10 ns pulses at 355 nm, while the damage threshold of the similar NE10A absorptive filter is 10 J/cm² for 10 ns pulses at 532 nm. As described on the previous tab, the LIDT value of an optic scales with the square root of the wavelength in the nanosecond pulse regime:

This scaling gives adjusted LIDT values of 0.08 J/cm² for the reflective filter and 14 J/cm² for the absorptive filter. In this case, the absorptive filter is the best choice in order to avoid optical damage.

Pulsed Microsecond Laser Example
Consider a laser system that produces 1 µs pulses, each containing 150 µJ of energy at a repetition rate of 50 kHz, resulting in a relatively high duty cycle of 5%. This system falls somewhere between the regimes of CW and pulsed laser induced damage, and could potentially damage an optic by mechanisms associated with either regime. As a result, both CW and pulsed LIDT values must be compared to the properties of the laser system to ensure safe operation.

If this relatively long-pulse laser emits a Gaussian 12.7 mm diameter beam (1/e²) at 980 nm, then the resulting output has a linear power density of 5.9 W/cm and an energy density of 1.2 x 10^-4 J/cm² per pulse. This can be compared to the LIDT values for a WPQ10E-980 polymer zero-order quarter-wave plate, which are 5 W/cm for CW radiation at 810 nm and 5 J/cm² for a 10 ns pulse at 810 nm. As before, the CW LIDT of the optic scales linearly with the laser wavelength, resulting in an adjusted CW value of 6 W/cm at 980 nm. On the other hand, the pulsed LIDT scales with the square root of the laser wavelength and the square root of the pulse duration, resulting in an adjusted value of 55 J/cm² for a 1 µs pulse at 980 nm. The pulsed LIDT of the optic is significantly greater than the energy density of the laser pulse, so individual pulses will not damage the wave plate. However, the large average linear power density of the laser system may cause thermal damage to the optic, much like a high-power CW beam.