1/2" (12 mm or 13 mm) Travel Motorized Actuators

• Compact, Bi-Polar Stepper Motor Actuator:
  • ZFS13: 89.5 mm (3.52") Long when Retracted
  • ZFS13B: 85.5 mm (3.36") Long when Retracted
• Manual Adjustment via Rear-Located Thumbscrew
• Non-Rotating Drive Tip
• Compatible with Mirror Mounts and Translation Stages using 1/4"-80 Thread (ZFS13) or Ø3/8" (9.525 mm) Mounting Barrel (ZFS13B)
• Also Available in 6 mm and 25 mm Travel Versions

Our ZFS13 and ZFS13B Actuators provide smooth, precise linear motion control in a sleek, compact package measuring just 89.5 mm (3.52") or 85.5 mm (3.36"), respectively, in length when fully retracted. This compact profile reduces the distance between the end of the actuator and optomechanical components, keeping the center of mass closer to the contact point than the ZST actuators.

Powered by a small-diameter, two-phase, bi-polar stepper motor, these actuators operate at speeds of up to 2.0 mm/s. The non-rotating drive tip reduces wear and friction and improves smoothness of motion by removing rotational contact at the tip. If power is not supplied to the actuator, manual adjustment is achievable using the rear-located thumbscrew. The actuator motor can be damaged if this thumbscrew is rotated while power is being supplied.

The ZFS13 actuator has a 1/4"-80 threaded barrel that can be mounted to any manual mirror mount for stage with 1/4"-80 threads, while the ZFS13B actuator has a Ø3/8" (Ø9.525 mm) barrel for compatibility with a wide range of translation and rotation stages. Simply remove the existing manual adjuster from the mount, and screw in our ZFS Actuator.

These actuators incorporate stepper motors that provide sufficient torque for loads up to 40 N. The actuators allow very small step sizes over the entire travel range, delivering greater flexibility with low (<15 µm) backlash and fine resolution. The design incorporates a 400:9 gear reduction head which, when combined with the 49 152 microsteps per revolution offered by the KST201 stepper motor driver, gives a theoretical travel per microstep of 0.46 nm (see the Calculations tab for details).

Hall effect limit switches prevent the unit from being overdriven and provide homing capability with an accuracy of <5.0 μm. The ZFS series actuators come with 0.6 m of cable terminated in a 15-pin D-Type connector (see the Pin Diagrams tab) that is compatible with our KST201 stepper motor controller. A 1 m (3.3 ft) extension cable (PAA614) is available separately.

The ZFS13B has a high tolerance standard Ø3/8" (Ø9.525 mm) mounting barrel that is compatible with many translation and rotation stages including our popular MT1 Translation Stages. The ZFS13 has been designed specifically to replace the manual adjusters in stages and mirror mounts that have 1/4"-80 threaded fittings. Simply remove the existing manual adjuster from the mount, and screw in our ZFS Actuator. The manual adjuster of the MT1 stage in Figure G1.1 is replaced with a ZFS13B motorized actuator.

Click to Enlarge

Required Controller:
KST201

• 49 152 Microsteps per Revolution
• 15 V Output at 12 W
• Trapezoidal and
  'S-Curve' Velocity Profiles

Click to Enlarge
Figure G1.1  MT1 Stage with Manual Adjuster Replaced by ZFS13B Actuator

• Non-Rotating Drive Tip
• Bi-Polar Stepper Motor Actuator: 123.0 mm (4.84") Long
• Two Mounting Options: Ø3/8" (Ø9.525 mm) Smooth Barrel or 1/4"-80 Threaded Barrel
• Compatible with Mirror Mounts and Translation Stages Using 1/4"-80 Thread or 3/8" (Ø9.525 mm) Mounting Block
• Also Available in 6 mm and 25 mm Travel Versions

Our ZST Actuators provide smooth, precise linear motion control in a package measuring 123.0 mm (4.84") in length. Powered by a small-diameter, two-phase, bi-polar stepper motor, these actuators operate at speeds of up to 2.0 mm/s. The non-rotating drive tip reduces wear and friction and improves smoothness of motion by removing rotational contact at the tip.

These actuators incorporate a stepper motor that provides sufficient torque for loads up to 40 N. They allow very small step sizes over the entire travel range, delivering greater flexibility with low (<15 µm) backlash and fine resolution. The design incorporates a 41:1 gear reduction head which, when combined with the 49 152 microsteps per revolution offered by the KST201 stepper motor driver, gives a theoretical travel per microstep of 0.5 nm (see the Calculations tab for details).

The ZST213 actuator has a 1/4"-80 threaded barrel that can be mounted to any manual mirror mount for stage with 1/4"-80 threads, while the ZT213B actuator has a Ø3/8" (Ø9.525 mm) barrel for compatibility with a wide range of translation and rotation stages, including our popular MT1 Translation Stages. Simply remove the existing manual adjuster from the mount, and screw in our ZST Actuator.

Hall effect limit switches prevent the unit from being overdriven and provide homing capability with an accuracy of <5.0 μm. The ZST series actuators come with 0.6 m (2 ft) of cable terminated in a 15-pin D-Type connector that is compatible with our KST201 stepper motor controller. A 1 m (3.3 ft) extension cable (PAA614) is available separately.

Click to Enlarge

Required Controller:
KST201

• 49 152 Microsteps per Revolution
• 15 V Output at 12 W
• Trapezoidal and
  'S-Curve' Velocity Profiles

Click to Enlarge
Figure G2.1  An RB13 3-Axis Stage shown with the manual adjusters replaced by three ZST213B actuators.

• DC Servo Actuator
• Sub-Micron Resolution
• Maximum Operating Speed: 2.6 mm/s
• Drop-In Replacement for Most 12 mm or 1/2" Manual Actuators
• Compatible with 1/4"-80 Thread or Ø3/8" (Ø9.525 mm) Barrel-Fitted Stages and Mounts
• Limit Switches for Zero Datum and Actuator Protection
• Also Available in 6 mm and 25 mm Travel Versions

Thorlabs' Z912 and Z912B motorized actuators are engineered for use with optical positioning devices. They offer high resolution in a lightweight package, which makes them ideally suited for demanding optical laboratory automation applications.

Electromechanical limit switches provide overdrive protection and accurate home positioning. The incorporated motor is capable of speeds up to 2.6 mm/s, but a maximum speed of 2.3 mm/s is recommended in order to maintain the specified control. The precision of the encoder (512 counts per motor revolution) results in a minimum resolution of about 29 nm. See the Calculations tab for details.

The Z912 has been designed specifically to replace the manual adjusters in stages and mirror mounts that have 1/4"-80 screw-in fittings, while the Z912B is for use with Ø3/8" (Ø9.525 mm) barrel clamps (e.g., the 1/2" manual micrometer in the MT Series Translation Stages). Simply remove the existing manual adjuster from the mount, and screw in our Z9 actuators, as shown in Figure G3.1.

In addition to the Z912 and Z912B motorized actuators, we also offer the Z912V and Z912BV vacuum-compatible versions (see below), which are rated for use down to 10^-6 Torr and are shipped with a 485 mm (1.6') flat ribbon cable, IDC connector, and converter cable for use with our KDC101 controller. For applications with different travel requirements, please see our 6 mm Z906 and 25 mm Z925 actuators.

The KDC101 DC Servo Controller is the required driver for the Z9 series actuators. The latest version of the Kinesis software and XA software can be downloaded here. When using the Kinesis software package, firmware version 2.2.8 or higher (included with Kinesis software version 1.14.40 or higher) is required to use the KDC101 with the Z9 actuators. Prior versions of firmware will operate the Z9 actuators but will call the actuators Z8.

Click to Enlarge

Required Controller:
KDC101

• 34 555 Encoder Counts per Revolution
• 15 V Output at 2.5 W
• Trapezoidal Velocity Profile

Click to Enlarge

View Imperial Product List

Item #	Qty	Description
Z912	1	12 mm Travel, DC Servo Motor Actuator, 1/4"-80 Mounting Thread
KS2	1	Ø2" Precision Kinematic Mirror Mount, 3 Adjusters
ME2-P01	1	Ø2" Protected Silver Mirror, 3.2 mm Thick
PH2	1	Ø1/2" Post Holder, Spring-Loaded Hex-Locking Thumbscrew, L = 2"
TR2	1	Ø1/2" Optical Post, SS, 8-32 Setscrew, 1/4"-20 Tap, L = 2"
SH8S050	1	8-32 Stainless Steel Cap Screw, 1/2" Long, 50 Pack
CF125	1	Clamping Fork for Ø1.25" Pedestal Bases, 1.24" Counterbored Slot, Universal
SH25S063	1	1/4"-20 Stainless Steel Cap Screw, 5/8" Long, 25 Pack
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View Metric Product List

Item #	Qty	Description
Z912	1	12 mm Travel, DC Servo Motor Actuator, 1/4"-80 Mounting Thread
KS2	1	Ø2" Precision Kinematic Mirror Mount, 3 Adjusters
ME2-P01	1	Ø2" Protected Silver Mirror, 3.2 mm Thick
PH50/M	1	Ø12.7 mm Post Holder, Spring-Loaded Hex-Locking Thumbscrew, L=50 mm
TR50/M	1	Ø12.7 mm Optical Post, SS, M4 Setscrew, M6 Tap, L = 50 mm
SH4MS12	1	M4 x 0.7 Stainless Steel Cap Screw, 12 mm Long, 50 Pack
CF125	1	Clamping Fork for Ø1.25" Pedestal Bases, 1.24" Counterbored Slot, Universal
SH6MS12	1	M6 x 1.0 Stainless Steel Cap Screw, 12 mm Long, 25 Pack
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Figure G3.1  A KS2 mirror mount with one screw adjuster replaced with a Z912 actuator.

• DC Servo Actuator
• Sub-Micron Resolution
• Vacuum Rating: 10^-6 Torr
• Maximum Operating Speed: 2.6 mm/s
• Drop-In Replacement for Most 12 mm or 1/2" Manual Actuators
• Compatible with 1/4"-80 Thread or Ø3/8" (Ø9.525 mm) Barrel-Fitted Stages and Mounts
• Limit Switches for Zero Datum and Actuator Protection
• Also Available in 6 mm and 25 mm Travel Versions

The Z912V and Z912BV actuators offer features and specifications similar to the Z912 actuators described above with the added benefit of being vacuum compatible down to 10^-6 Torr. They incorporate vacuum-rated servo motors, a phosphorus bronze internal coupling mechanism and mounting bush, and high-vacuum grease.

These actuators are shipped with a 485.0 mm (19.09") vacuum-compatible flat ribbon cable with an IDC connector. The cable has 1.27 mm (0.05") pitch, 28 AWG stranded conductors, and fluorinated ethylene propylene (FEP) insulation. A converter cable for use with the KDC101 controller is also supplied, but it is not vacuum compatible and should only be used outside the chamber.

For applications with different travel requirements, please see our 6 mm and 25 mm actuators. For vacuum-compatible versions of our stages and mirror mounts, please contact Tech Support.

The KDC101 DC Servo Controller is the required driver for the Z9 series actuators. The latest version of the Kinesis software and XA software can be downloaded here. When using the Kinesis software package, firmware version 2.2.8 or higher (included with Kinesis software version 1.14.40 or higher) is required to use the KDC101 with the Z9 actuators. Prior versions of firmware will operate the Z9 actuators but will call the actuators Z8.

Click to Enlarge

Required Controller:
KDC101

• 34 555 Encoder Counts per Revolution
• 15 V Output at 2.5 W
• Trapezoidal Velocity Profile

Click for Details
Figure G5.2  The control cable can be adjusted up to 110° for space-constrained applications.

• Ø3/8" (Ø9.525 mm) Mounting Barrel for Compatibility with Translation Stages
• Compact Design: 31.5 mm x 17.0 mm (W x H)
• Manual Adjustment via Knob on Adjuster Screw
• 125 V Maximum Operating Voltage
• Ideal for Set-and-Hold Applications that Require High-Resolution Relative Positioning
• Also Available in 25 mm and 50 mm Travel Versions

Thorlabs' PIA13 Piezoelectric Inertia Actuator provides high-resolution linear motion control with a long piezo-controlled translation range in a compact package. It can support loads up to 2.5 kg and preloads up to 25 N with typical step size ranging from 10 nm to 30 nm with no backlash. The step size can be adjusted up to 30% to a maximum of approximately 30 nm using the KIM101 Controller and Kinesis software. However, due to the open-loop design, piezo hysteresis, and application conditions such as the direction of travel, the achieved step size of the system can vary by up to 20% and is not normally repeatable. An external feedback system will need to be used to overcome this variance.

This actuator has a Ø3/8" (Ø9.525 mm) barrel that can be mounted in a manual stage that has a Ø3/8" (Ø9.525 mm) mounting clamp. For compatibility with 1/4"-80 or 3/16"-100 threaded mirror mounts see our 10 mm travel piezo inertia actuators. The actuator is self-locking when at rest and when there is no power supplied to the piezo, making the actuator ideal for set-and-hold applications that require nanometer resolution and long-term alignment stability. Manual adjustments can be made using the knob on the adjuster screw, as long as the piezo is not actively translating the screw; the knob is also compatible with 5/64" (2.0 mm) hex keys.

Powered by a 10 mm long discrete piezo stack, the actuator can operate at speeds of up to 3.6 mm/minute. The design of the piezo motor will rotate the tip of the lead screw during translation. For information on the design of our piezo inertia "slip-stick" motor actuators, please see the complete presentation here.

Required Controller
A KIM001 or KIM101 controller is required to operate our PIA13 Piezo Inertia Actuator; the actuator cannot be operated using a standard piezo controller. These drivers have an internal sawtooth voltage signal generator capable of sending sub-millisecond pulses (steps) with controllable amplitudes from 85 V to 125 V. The KIM001 and KIM101 controllers offer one and four output channels, respectively.

For more information, please see the full web presentation here.

Click to Enlarge

Required Controller:
KIM001 or KIM101

• KIM001: Single-Channel Output
• KIM101: Four Output Channels, Capable of Multi-Channel Operation
• Standalone Control via Top Panel or PC Control via USB
• Voltage Output from 85 V to 125 V

Click to Enlarge
Figure G5.1  PIA13 Inertia Actuator Being Used to Drive an MT1 13 mm Translation Stage
(Stage Sold Separately)

• Compact Design: 31.5 mm x 17.0 mm (W x H)
• Manual Adjustment via Knob on Adjuster Screw
• Rated Down to 10^-6 Torr
• 125 V Maximum Operating Voltage
• Ø3/8" (Ø9.525 mm) Mounting Barrel for Compatibility with Translation Stages
• Ideal for Set-and-Hold Applications that Require High-Resolution Relative Positioning
• Also Available in 25 mm and 50 mm Travel Versions

Thorlabs' PIA13VF Vacuum-Compatible Piezoelectric Inertia Actuator is rated down to 10^-6 Torr operation and provides high-resolution linear motion control with a long piezo-controlled translation range in a compact, vacuum-compatible package. It can support loads up to 2.5 kg and preloads up to 25 N with typical step size ranging from 10 nm to 30 nm with no backlash. The step size can be adjusted up to 30% to a maximum of approximately 30 nm using the KIM101 Controller and Kinesis software. However, due to the open-loop design, piezo hysteresis, and application conditions such as the direction of travel, the achieved step size of the system can vary by up to 20% and is not normally repeatable. An external feedback system will need to be used to overcome this variance.

This actuator has a Ø3/8" (Ø9.525 mm) barrel that can be mounted in a manual stage that has a Ø3/8" (Ø9.525 mm) mounting clamp. For compatibility with 1/4"-100 threaded mirror mounts see our 10 mm travel piezo inertia actuators. The actuator is self-locking when at rest and when there is no power supplied to the piezo, making the actuator ideal for set-and-hold applications that require nanometer resolution and long-term alignment stability. Manual adjustments can be made using the knob on the adjuster screw, as long as the piezo is not actively translating the screw; the knob is also compatible with 5/64" (2.0 mm) hex keys.

Each actuator has an integrated 0.75 m flying lead, plus 1.0 m of cored cable for wiring outside the vacuum chamber. The flying leads and cored cable lengths can be cut down as needed, but the total length (inside and outside) should not exceed 2.0 m. As shown in Figure G6.1, the flying lead for each actuator can be rotated up to 110° for space-constrained applications.

Powered by a 10 mm long discrete piezo stack, the actuator can operate at speeds of up to 3.6 mm/minute. The design of the piezo motor will rotate the tip of the lead screw during translation. For information on the design of this piezo inertia "slip-stick" motor actuator, please see the complete presentation here.

Required Controller
A KIM001 or KIM101 controller is required to operate our PIA13VF Piezo Inertia Actuator; the actuator cannot be operated using a standard piezo controller. These drivers have an internal sawtooth voltage signal generator capable of sending sub-millisecond pulses (steps) with controllable amplitudes from 85 V to 125 V. The KIM001 and KIM101 controllers offer one and four output channels, respectively.

For more information, please see the full web presentation here.

Click to Enlarge

Required Controller:
KIM001 or KIM101

• KIM001: Single-Channel Output
• KIM101: Four Output Channels, Capable of Multi-Channel Operation
• Standalone Control via Top Panel or PC Control via USB
• Voltage Output from 85 V to 125 V

Click for Details
Figure G6.1  The flying lead can be adjusted up to 110° for space-constrained applications.

• 1.5 cc Syringe of Apiezon 100 Grease
• Convenient, Inexpensive Package that Reduces Waste
• Prolongs Lifetime of Actuator
• Ready to Dispense
• Vacuum Compatible to 10^-9 Torr

This Apiezon grease has excellent anti-seize properties. It contains PTFE for maximum lubricity and is ideal for re-lubricating the lead screw threads of our ZST, ZFS, and Z9 series actuators. It is supplied in a syringe for easy application and is recommended both for general use and for vacuum applications down to 10^-9 Torr. It has an optimal working range of 10 to 30 °C (50 to 86 °F).

Note: It is recommended that the lead screw and end ball of the Z9, ZFS, and ZST actuators are lubricated every 10 000 cycles or whenever a squeaking noise is heard during motion.

Thorlabs' DRV, ZST, and ZFS Stepper Motor Actuators, as well as our Z9 DC Servo Motor Actuators, come with cables for connecting to the required controllers. Thorlabs also offers separate cables that may be used as extension cables.

Stepper Motor Cables
Thorlabs offers a variety of cables to support several stepper motor actuator and controller combinations. Supported stepper motors include our ZST, ZFS, and DRV actuators; supported controllers include our BSC benchtop controllers, our KST201 K-Cube^® Controller, and our MST602 Rack Control Module. In order to see which cable is compatible with a given combination of stepper motor and controller, please see Table 747A. The pin assignment for each cable is given in the full web presentation here. Please note that these cables cannot be used with motors and controllers that do not match their pin assignment, even if the connectors are the same.

DC Motor Cables
The PAA632 is a 2.5 m cable for our Z9 series of DC motor actuators. This cable is intended to be used with the KDC101 K-Cube DC Servo Motor Controller. The pin assignment for this cable is given in the full web presentation here. Although it uses a 15-pin connector, this cable is not compatible with any of our stepper motors.

Table 747A  Motor and Controller Cable Compatibility
Motor	Controller	Compatible Cable
		PAA614 (1 m)
ZST and ZFS Stepper Motor Actuator	KST201 K-Cube Controller
		PAA614 (1 m)a
	KST201 K-Cube Controller
		PAA612 (1 m) or PAA613 (3 m)
DRV Series Stepper Motor Actuatora	BSC Benchtop Controller and MST602 Rack Controller
		PAA632 (2.5 m)
Z9 DC Servo Motor Actuator	KDC101 K-Cube Controllerb

• The KST201 K-Cube Controller can be used to drive our DRV225 or DRV250 Stepper Motor Actuators at reduced speed; it is not compatible with the DRV208 actuator.
• Green shading indicates hardware for DC servo motors.